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Semiconductor correlation

Vacuum Technologies

Thermoelectronics

Equipment

Precision Quartz Precision Ceramics Si Fusion and Si Parts Quartz Crucible Single Crystal Furnace Precision Cleaning Semiconductor Wafer DCB Ceramic Substrate Ferrofluid SiC Parts

Ferrofluidic Vacuum Feedthroughs OEM Non-standard Assembly Service Electron Beam Evaporator Metal Processing showerhead

Thermoelectric Module

Industrial Washing Equipment General Machinery and Equipment Cutting Tools & Saw Blades

Markets

IC Display Optical Fiber Communication Power Electrons EV/High-speed Train Home/Medical Appliance

Technical Center

Big Wafers New Materials Thermal Management Vacuum Chamber Manufacturing Pricise Cleaning

Semiconductor correlation

Vacuum Technologies

Thermoelectronics

Equipment

SiC Parts

SiC Part

Among the material products, CVD-SiC is a growth product which can be used as fixtures and components of semiconductor production equipment. SiC is the chemical compound composed of a 1:1 combination of Silicon and Carbon whose hardness ranks the third in the world surpassed only by Diamonds and Boron carbide. Ferrotec is using silicon and carbon element containing gases for manufacturing, which is also called CVD method. For SiC wafer manufacturing, SiC is coated over the surface of the plate shaped graphite substrate by CVD. After cutting the outer edges, the graphite substrate is removed by high-temperature oxidation and then several subsequent processes are carried out to manufacture the SiC wafer. SiC has attracted more attention as a high purity material applied in the energy industry and other most advanced ones as well.

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Tel: 0571-88995910

E-mail: ceramics@ferrotec.com.cn

Tel: 0571-88995910

E-mail: ceramics@ferrotec.com.cn

Heat resistance

Chemical stability

Oxidation resistance

Characteristic and Application

Ferrotec SiC components have strong oxidation resistance, chemical stability, heat resistance, and excellent stability even at 2000℃. They are not only widely used in the fabrication of semiconductor materials manufacturing requiring wafer boat, tubes, and dummy wafers, but also applied to fixtures used at high temperatures. SiC components also widely used in semiconductor production equipment,automobile, satellite, energy and other advanced industries.

Application scenario